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GemStar Benchtop ALD systems


-  Chamber accommodates up to 8” diameter wafers
-  Uniform precursor flow with ARRADIANCE linear shower head
-  Up to 8 precursors can be installed and run concurrently
-  Separate manifolds for metal organics and oxidizer/reducers
-  Powerful and easy to use control and analysis software
-  Optional sealed mini-environment interface




www.arradiance.com



EURIS Sarl - Grenoble Air Parc - 16 Rue Charles Lindbergh - 38590 St Etienne de St Geoirs - FRANCE
Tel:+33 (0)4 76 35 07 07 - Fax: +33 (0)4 76 35 07 47 - E-mail:info@euris-semiconductor.com
Sarl au capital de : 250 000 Euros - RCS Grenoble 401 469853 00048 - Code APE 4652Z
SW V12.0 du 17/10/2016espacement© EURIS Sarl, 2000-2016